About the project

The future of actuators

Keeping up with the demand for manufacturing growth is the main challenge for the entire semiconductor industry. The Eindhoven Engine project ‘Advanced long-range piezo-electric wafer stage for next generation lithography and metrology application’ therefore aims to demonstrate the feasibility of an ultra-short stroke stage using lightweight and compact piezo-electric actuators. Unlike ‘force’ actuators, these are stiff and non-linear, requiring breakthroughs in materials, electronics, control, mechatronic implementation and sensor systems.

A collective system goal

The goal of this project is a proof-of-concept for a relatively large-range (>10 um) piezo-electric stage and an integrated measurement system with an uncertainty of <100 pm. ASML is driving this research towards alternative wafer stage concepts and actively contributes expert application knowledge and technology regarding lithographic wafer stages and state-of-the-art, high-precision mechatronics and system engineering. NTS group, VDL ETG and TNO have also expressed in interest in joining. Work is carried out via four PhD research projects which are co-located at TU/e’s Multimedia Paviljoen.

Important insights for future equipment

Besides its main goal, this project will open the door to various innovations within the semiconductor field. A metrology concept study into integrated photonics, for instance, will allow for new sensor layouts and position or deformation measurement principles. A study into forces and displacements, piezo stiffness, electronics inputs and parasitic behavior has also already provided valuable input for future system architecture studies.

About the project

This follow-up project to SmartONE investigates the possibilities of achieving a more integral systemic framework for the previously established lines of research. This concerns the Internet of Things and the developments that place very high demands on fixed, wireless and the increasingly optical networks to transport substantial amounts of data efficiently and reliably. Developments in the field of IT make it possible for more and more devices to be connected to each other. In the future many billions of devices are likely to be connected via the internet and go way beyond the familiar smartphone apps that regulate your thermostat or home lighting system.

About the project

Smart Manufacturing aims to improve factory efficiency by optimizing production processes, but SMEs often lack the capacity to create innovation in this domain. Bringing together Eindhoven Engine, Fontys, TNO and Brainport Industries Campus, the SmartMan project comprises research into various facets of smart manufacturing, including robot-assisted manufacturing, data sharing, industrial AI, virtual reality and autonomous transport. Student projects will be executed at SMEs with the goal of developing knowledge, technology and methods for combining quality, automation and flexibility in manufacturing. Success will be measured in terms of the economic value of improvements per project and company.