About the project

The future of actuators

Keeping up with the demand for manufacturing growth is the main challenge for the entire semiconductor industry. The Eindhoven Engine project ‘Advanced long-range piezo-electric wafer stage for next generation lithography and metrology application’ therefore aims to demonstrate the feasibility of an ultra-short stroke stage using lightweight and compact piezo-electric actuators. Unlike ‘force’ actuators, these are stiff and non-linear, requiring breakthroughs in materials, electronics, control, mechatronic implementation and sensor systems.

A collective system goal

The goal of this project is a proof-of-concept for a relatively large-range (>10 um) piezo-electric stage and an integrated measurement system with an uncertainty of <100 pm. ASML is driving this research towards alternative wafer stage concepts and actively contributes expert application knowledge and technology regarding lithographic wafer stages and state-of-the-art, high-precision mechatronics and system engineering. NTS group, VDL ETG and TNO have also expressed in interest in joining. Work is carried out via four PhD research projects which are co-located at TU/e’s Multimedia Paviljoen.

Important insights for future equipment

Besides its main goal, this project will open the door to various innovations within the semiconductor field. A metrology concept study into integrated photonics, for instance, will allow for new sensor layouts and position or deformation measurement principles. A study into forces and displacements, piezo stiffness, electronics inputs and parasitic behavior has also already provided valuable input for future system architecture studies.

About the project

Smart Manufacturing aims to improve factory efficiency by optimizing production processes, but SMEs often lack the capacity to create innovation in this domain. Bringing together Eindhoven Engine, Fontys, TNO and Brainport Industries Campus, the SmartMan project comprises research into various facets of smart manufacturing, including robot-assisted manufacturing, data sharing, industrial AI, virtual reality and autonomous transport. Student projects will be executed at SMEs with the goal of developing knowledge, technology and methods for combining quality, automation and flexibility in manufacturing. Success will be measured in terms of the economic value of improvements per project and company.

About the project

FITTing Persons’ vitality and optimizing their Work Environment

In an increasingly competitive global economy, physical inactivity and burnout rates are increasing. Sustainable employability based on good physical and mental health is therefore crucial, preventing absenteeism and also reducing healthcare costs. POWEr FITTing optimizes the relationship between vitality and the (home) office environment through the combination of data acquisition, integration and application for the validation and acceleration of user-oriented solutions. By taking into account individual, societal and contextual factors, this enables employees to remain both healthy and productive. This benefits companies, individuals and wider society.

About the project

The iHeat@Home project contributes to a breakthrough innovation in thermal energy storage: a heat battery which is better, cheaper, smaller and greener than any competitor. This will accelerate the energy transition, promote the development of renewable energy sources, reduce grid investments and create new business. This is all happening here in the Brainport region.

iHeat@Home focuses on solutions for real-time data on the heat battery’s state-of-charge and its optimal data management, with three coherent solutions:

1. The basis for a sensor which is robust and cheap
2. Communication protocols and data managemen
3. Integration in a validated, user-ready heat battery. The aim is to bring this technology to the market by 2023.

About the project

The goal is to develop a self-learning module that can monitor and diagnose climate systems in large buildings. This will enable a climate system to perform better; for instance, lower energy consumption, better thermal comfort and better air quality. More efficient maintenance is also possible. The module will be used as an add-on for the Building Energy Management System (BEMS) of offices.

About the project

The concentration of nitrogen dioxide and particulate matter is still too high in the Netherlands according to WHO guideline values in 2021. In the Eindhoven region, several technical developments and research and innovation initiatives have been started in this field. As a result, a lot of information on population dynamics, such as commuting traffic and air pollution, is readily available. In DynaPopeX, this information is brought together for the first time and visualization techniques can be used to make connections to the sources of air pollution.

The combination of data, location and human movements in Eindhoven makes it possible to take tangible measures to reduce the exposure of people on the street to harmful particulate matter and limit possible harm to health.