Ron de Bruijn – PhD candidate TU/e
My research is about wafer stages that are driven by piezoelectric actuators. These actuators make a mechanical contact between the rest of the machine and the wafer stage. Minimal disturbance or vibration in the rest of the machine could actually affect a wafer position.
Gregor van Baars – Projectlead TU/e & Systems engineer TNO
ASML is extremely successful with their current technology. The question lies in how much room there is for expansion. This research begins from a completely different standpoint, offering significant advantages but also presenting numerous challenges.